[Versum Materials Newsletter, LINK] An important milestone for the Versum Materials DS&S was realized recently with the sale and commissioning of the onethousandth (1,000) CHEMGUARD® Gen III high-purity, liquid delivery system since its introduction in 2016. The 1,000-plus units are now running in the latest high-volume semiconductor fabs globally with more than 200 molecules now approved for delivery. Built on a legacy of more than 30 years of supplying advanced materials and delivery systems to the worldwide semiconductor and electronics industries, Versum Material’s DS&S team continues to design and build safer, more reliable delivery equipment for high-purity gas and liquid distribution.
CHEMGUARD 500 is specifically designed for very low vapor pressure precursors. The patented, automac solvent purge ensures molecule purity on some of the lowest vapor pressure molecules used in semiconductor manufacturing. A small sample of the molecules approved in a CG500 are: TDMAT, TDEAT, TAETO, TBTDET, TDEAH, TEMAH, TEMAHf, TEMAZr and TPOSL. (From the CHEMGUARD GEN III 500 DATA SHEET)
“The CHEMGUARD Gen III system has been very well received by Versum Materials major customers, especially with its built-in redundancies,” said Jeff Chung, DS&S Asia Sales Manager.
Said David Eshelman, CHEMGUARD Product Manager, “The CHEMGUARD product family was introduced in 1999 under the Schumacher brand. Our customers’ original requests for improved safety and uptime helped to create the CHEMGUARD systems.”
Eshelman further explained that those requirements still exist today, but with each node, the molecules and processes used have become much more technically challenging. “The specific needs of today’s specialty, flammable or highly energetic molecules have been addressed by the unique CHEMGUARD Gen III model designs.”
Capitalizing on its materials and delivery systems expertise, Versum Materials recently created an experienced, multidisciplined team to review new molecules as they ramp and gain market acceptance. The team evaluates the molecule safety and process needs and helps speed the time-to-market for new molecules and processes by having a delivery solution ready when technology ramps.
“When our team says ‘Go,’ we know that a molecule is CHEMGUARD-ready,” said Eshelman. “The next node is right around the corner. We want the market to know that the established CHEMGUARD system continues to advance to meet the demands of a changing marketplace.”
CHEMGUARD GEN III CONTROLLER RETROFIT DATA SHEET (http://bit.ly/2PO164F)
CHEMGUARD GEN III 500 DATA SHEET (http://bit.ly/2zlnFU8)
CHEMGUARD GEN III 100 – 400 DATA SHEET (http://bit.ly/2QhjOBd)