EpiGaN, the Belgian GaN-on-Si and GaN-on-SiC epitaxial wafer provider, has ordered a new AIX G5+ C system from AIXTRON to expand its production capability for large size wafer.
The new AIXTRON AIX G5+ C reactor will be installed at EpiGaN’s manufacturing site in Hasselt Belgium in the first quarter of 2019 and start to operate afterwards. The fully automated Planetary® MOCVD system features in-situ chamber cleaning and enables configurations of 8x6 inch or 5x8 inch epitaxial wafers to be automatically loaded and removed by a cassette-to-cassette wafer transfer module.
Source: LEDinside LINK
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