Epitaxial deposition and process equipment maker Veeco Instruments Inc
of Plainview, NY, USA has shipped multiple TurboDisc EPIK 868 gallium
nitride (GaN) metal-organic chemical vapor deposition (MOCVD) systems
to several leading Chinese LED makers for the production of light
emitting diodes for solid-state lighting applications.
Compared with previous generations, the EPIK 868 MOCVD system enables
cost per wafer savings of more than 20%, with a combined advantage of
best operating uptime, low maintenance costs and what is claimed to be
best-in-class wafer uniformity, as well as a compact architecture with
the best footprint efficiency for high-volume LED production.
Source: Semiconductor Today LINK
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