Wednesday, November 21, 2018

China's InnoScience orders Aixtron AIX G5+ C MOCVD systems for manufacturing 650V GaN-on-Si devices

Deposition equipment maker Aixtron SE of Herzogenrath, near Aachen, Germany is to deliver multiple AIX G5+ C MOCVD systems to China's InnoScience Technology Co Ltd for the development of gallium nitride (GaN) power devices, which are increasingly favored over silicon power devices due to their superior performance at high frequency. All Aixtron cluster tools will feature a 5x200mm-wafer configuration and will be shipped by second-quarter 2019.
Source: Semiconductor Today LINK

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