ESPOO, Finland, 29th November, 2017 – Picosun Oy (Finland), Silex Microsystems AB (Sweden), and Pegasus Chemicals Ltd (UK)
have joined forces to develop and provide novel ALD (Atomic Layer
Deposition) solutions and processes for MEMS (MicroElectroMechanical
Systems) industries. The aim of the collaboration is to realize
emerging, advanced MEMS structures that would not be possible to
manufacture by any other thin film deposition methods.
Today,
MEMS are crucial components in several everyday applications such as
mobile phones, cars and in various sensor systems. In addition to these
already vast markets, the rapidly spreading Internet-of-Things with its
billions of independently communicating electronic devices is a huge
driving force to accelerate MEMS industry’s exponential growth in the
very near future.
This is Silex Microsystems (Promotion Viedo from Youtube)
In
the Picosun-Silex-Pegasus collaboration, a PICOSUN™ ALD cluster
platform is installed at Silex’s MEMS foundry in Järfälla, Sweden. The
platform consists of a fully automated, factory integrated
cassette-to-cassette vacuum robot for substrate handling and a PICOSUN™
P-300F ALD reactor capable of coating up to 25 pcs 8” wafers in a batch.
The installed reactor can deposit various metal oxides, metal nitrides,
and pure metals on up to tens of thousands of wafers per month (*).
Pegasus develops and manufactures the precursor chemicals required for
the ALD processes and provides the technical support and delivery
options for individual applications. The cluster platform can be later
upgraded with two additional ALD reactors. In the collaboration,
engineers and scientists from all three partners work together to solve
existing problems in MEMS processing, as well as to develop completely
new openings on how to realize novel MEMS devices.
“We have been working with Picosun since 2010 and now with this project we can bring our collaboration to a completely new level. We are very excited to have the PICOSUN™ ALD cluster platform in our cleanroom. It enables us to develop novel, production-proven ALD solutions for our customers in advanced MEMS applications,” says Dr. Niklas Svedin, Vice President of Engineering at Silex Microsystems.
“We have been working with Picosun since 2010 and now with this project we can bring our collaboration to a completely new level. We are very excited to have the PICOSUN™ ALD cluster platform in our cleanroom. It enables us to develop novel, production-proven ALD solutions for our customers in advanced MEMS applications,” says Dr. Niklas Svedin, Vice President of Engineering at Silex Microsystems.
“This
is a valuable project for us, as the use of ALD in MEMS processing is
increasing very fast. We have already strong presence in the MEMS
market, but new applications come up weekly and we want to keep our
spearheading position in this development. Now in the SALADIN project we
have partners with whom we can also test and develop new ideas of our
own how ALD could be implemented in the MEMS process flow,” continues
Mr. Juhana Kostamo, Managing Director of Picosun.
“The
MEMS industry is a fast-growing market and it is very interesting for
us to be involved in the process of introducing the groundbreaking ALD
cluster platform to it. We are eager to be in the frontline of the
chemical development for this field and focusing on advanced MEMS
applications,” summarises Dr. Paul Williams, Technical Director of
Pegasus Chemicals.
Picosun Oy (LINK)
Silex Microsystems (LINK)
Pegasus Chemicals (LINK)
(*) Throughput calculated for 10 nm Al2O3, 90% system uptime.
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