Tuesday, August 9, 2016

Lam Research Enables Next-Generation Memory with Industry's First ALD Process for Low-Fluorine Tungsten Fill

Lam Research Corp. , an advanced manufacturer of semiconductor equipment, today introduced an atomic layer deposition process for depositing low-fluorine-content tungsten films, the latest addition to ...

http://finance.yahoo.com/news/lam-research-enables-next-generation-200500171.html

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